Microfluidics, bioMEMS, and medical microsystems 3 : 24-26 January 2005 : San Jose, California, USA. : Jan 2005, San Jose, CA. (SPIE Proceedings ; 5718)

Microfluidics, bioMEMS, and medical microsystems 3 : 24-26 January 2005 : San Jose, California, USA. : Jan 2005, San Jose, CA.

(SPIE Proceedings ; 5718)

Call No. (NDL): M17-05-1265
Bibliographic ID of National Diet Library: 000007731851

Material type: 図書

Author: Semiconductor Equipment and Materials International (SEMI)

Publisher: SPIE

Publication date: c2005.

Material Format: Paper

Capacity, size, etc.: xli, 300 p. : ill. ; 28 cm.

NDC: -

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Note (General)：: Papers.Errata sheet has tipped in.

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Paper

Material Type: 図書
ISBN: 0819456926
ISSN (series): 0277-786X
Title: Microfluidics, bioMEMS, and medical microsystems 3 : 24-26 January 2005 : San Jose, California, USA. : Jan 2005, San Jose, CA.
Series Title: SPIE Proceedings ; 5718
Author Heading: Semiconductor Equipment and Materials International (SEMI)
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2005.
Publication Date (W3CDTF): 2005
Extent: xli, 300 p. : ill. ; 28 cm.
Place of Publication (Country Code): US
NDLC: M17
Note (General): Papers.
Errata sheet has tipped in.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-05-1265
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000007731851
http://id.ndl.go.jp/bib/000007731851
Bibliographic Record Category (NDL): 215