ULSI process integration 7 : 7th symposium on ULSI process integration : 220th meeting of the Electrochemical Society : Oct 2011, Boston, MA. (ECS Transactions ; 41 (no. 7))

ULSI process integration 7 : 7th symposium on ULSI process integration : 220th meeting of the Electrochemical Society : Oct 2011, Boston, MA.

(ECS Transactions ; 41 (no. 7))

Call No. (NDL): M17-12-2616
Bibliographic ID of National Diet Library: 023452149

Material type: 図書

Author: -

Publisher: Electrochemical Society

Publication date: c2011.

Material Format: Paper

Capacity, size, etc.: ix, 417 p. ; 23 cm.

NDC: -

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Notes on use

Note (General)：: Papers.

Other physical details：: ill.

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Paper

Material Type: 図書
ISBN: 9781566779074 (Hardcover)
9781607682615 (PDF)
ISSN: 19386737 (online)
21512051 (cd-rom)
ISSN (series): 19385862
Title: ULSI process integration 7 : 7th symposium on ULSI process integration : 220th meeting of the Electrochemical Society : Oct 2011, Boston, MA.
Series Title: ECS Transactions ; 41 (no. 7)
Publication, Distribution, etc.: Pennington : Electrochemical Society
Publication Date: c2011.
Publication Date (W3CDTF): 2011
Extent: ix, 417 p.
Other physical details: ill.
Size: 23 cm.
Additional Title: Dielectric and semiconductor materials, devices, and processing.
Place of Publication (Country Code): US
Text Language Code: eng
NDLC: M17
Target Audience: 一般
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-12-2616
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 023452149
http://id.ndl.go.jp/bib/023452149
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 215