Performance Improvement of Low-Temperature Polycrystalline Silicon Thin-Film Transistors with Fluorinated Silicate Glass Drive-In Masking Layer
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- Material Type
- 記事
- Author/Editor
- Ching-Lin FanYi-Yan LinShou-Kuan Wang 他
- Author Heading
- Periodical title
- Japanese journal of applied physics : JJAP
- No. or year of volume/issue
- 51(10)(1):2012.10
- Volume
- 51
- Issue
- 10
- Sequential issue number
- 1
- Pages
- 106502-1-4