MEMSとナノテクノロジーのシームレス融合技術--実装技術への期待と可能性

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MEMSとナノテクノロジーのシームレス融合技術--実装技術への期待と可能性

Call No. (NDL)
Z16-1617
Bibliographic ID of National Diet Library
10400695
Material type
記事
Author
田畑 修
Publisher
東京 : エレクトロニクス実装学会
Publication date
2008-09
Material Format
Paper
Journal name
マイクロエレクトロニクスシンポジウム論文集 18 2008.9.18・19
Publication Page
p.1~10
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Paper

Material Type
記事
Author/Editor
田畑 修
Author Heading
Periodical title
マイクロエレクトロニクスシンポジウム論文集
No. or year of volume/issue
18 2008.9.18・19
Volume
18
Pages
1~10
Publication date of volume/issue (W3CDTF)
2008-09
Publication (Periodical Title)
東京 : エレクトロニクス実装学会