Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
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CiNii Research
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Title
- Author/Editor
- 小宮 剛彦大須賀 俊之木場 龍彦 他
- Series Title
- Alternative Title
- High precision alignment stages
- Periodical title
- 技報安川電機 = Yasukawa technical review
- No. or year of volume/issue
- 72(3) (通号 280) 2008
- Volume
- 72
- Issue
- 3