Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 森田 裕宣渡邊 実
- Series Title
- Alternative Title
- MEMS allowable alignment errors of a MEMS dynamic optically reconfigurable gate array
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 110(362) 2011.1.17・18
- Volume
- 110
- Issue
- 362