衝撃波蒸着法により生成されたTiとTiN薄膜の特性
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- Material Type
- 記事
- Author/Editor
- 江角 弘道 他
- Author Heading
- Periodical title
- 広島電機大学・広島自動車工業短期大学研究報告 = Memoirs of Hiroshima-Denki Institute of Technology and Hiroshima Junior College of Automotive Engineering / 広島電機大学, 広島自動車工業短期大学 編
- No. or year of volume/issue
- (通号 22) 1989.12
- Sequential issue number
- 22
- Pages
- p23～30
- Publication date of volume/issue (W3CDTF)
- 1989-12
- ISSN (Periodical Title)
- 0286-0562