同心円筒形DCグロー放電によるα-Si:H成膜時の基板加熱の解析 (CVD<特集> ; シミュレーション・移動現象)
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- Material Type
- 記事
- Author/Editor
- 山口 由岐夫 他
- Series Title
- Author Heading
- Periodical title
- 化学工学論文集
- No. or year of volume/issue
- 16(3) 1990.05
- Volume
- 16
- Issue
- 3
- Pages
- p605～613