レーザPVD法によるセラミック硬質膜の作成
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CiNii Research
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 宮沢 肇 他
- Author Heading
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 59(1) 1993.01
- Volume
- 59
- Issue
- 1
- Pages
- p113～118
- Publication date of volume/issue (W3CDTF)
- 1993-01