@prefix rdf: . @prefix rdfs: . @prefix owl: . @prefix skos: . @prefix xl: . @prefix rdag1: . @prefix rda: . @prefix rdaa: . @prefix frbrent: . @prefix foaf: . @prefix ndl: . @prefix dct: . foaf:primaryTopic ; rdf:type ; dct:modified "2003-05-06T16:45:56"; dct:created "2003-05-01"; xl:prefLabel [xl:literalForm "Dhudishia, Vallabh H"]; rdfs:label "Dhudishia, Vallabh H"; dct:source "半導体製造装置の信頼度向上 / 坂本雄三郎, Vallabh H. Dhudshia 共著"; skos:exactMatch ; skos:inScheme . rdf:type ; foaf:name "Vallabh H Dhudishia".