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@prefix owl: <http://www.w3.org/2002/07/owl#>.
@prefix skos: <http://www.w3.org/2004/02/skos/core#>.
@prefix xl: <http://www.w3.org/2008/05/skos-xl#>.
@prefix rdag1: <http://RDVocab.info/ElementsGr1/>.
@prefix rda: <http://RDVocab.info/ElementsGr2/>.
@prefix rdaa: <http://rdaregistry.info/Elements/a/>.
@prefix frbrent: <http://RDVocab.info/uri/schema/FRBRentitiesRDA/>.
@prefix foaf: <http://xmlns.com/foaf/0.1/>.
@prefix ndl: <http://ndl.go.jp/dcndl/terms/>.
@prefix dct: <http://purl.org/dc/terms/>.

<http://id.ndl.go.jp/auth/ndlna/00916596>
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	dct:modified "2003-07-18T17:49:08";
	dct:created "2003-07-01";
	xl:prefLabel [xl:literalForm "Program Committee, workshop on physical chemistry of wet etching of silicon"];
	rdfs:label "Program Committee, workshop on physical chemistry of wet etching of silicon";
	dct:source "3rd workshop on physical chemistry of wet etching of silicon";
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	skos:historyNote "Program Committee, 3rd workshop on physical chemistry of wet etching of silicon→Program Committee, workshop on physical chemistry of wet etching of silicon (20030718)".

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	foaf:name "Program Committeeworkshop on physical chemistry of wet etching of silicon".