レーザ干渉計を搭載した高精度表面粗さ測定機の開発
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- Material Type
- 記事
- Author/Editor
- 直井 一也青戸 智浩佐藤 浩志
- Alternative Title
- Development of new instrument for the traceable measurement of surface texture equipped with laser interferometer
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 77(11) (通号 923) 2011.11
- Volume
- 77
- Issue
- 11
- Sequential issue number
- 923