3次元レーザ光散乱によるナノ加工表面性状の測定評価 (特集 加工面の高精度計測・分析技術の最先端)

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3次元レーザ光散乱によるナノ加工表面性状の測定評価

(特集 加工面の高精度計測・分析技術の最先端)

Call No. (NDL)
Z16-1147
Bibliographic ID of National Diet Library
023348456
Material type
記事
Author
高谷 裕浩
Publisher
東京 : 砥粒加工学会
Publication date
2011-12
Material Format
Paper
Journal name
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 55(12)=352:2011.12
Publication Page
p.697-700
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Paper

Material Type
記事
Author/Editor
高谷 裕浩
Author Heading
Alternative Title
Nano-machined surface inspection based on three dimensional laser light scattering
Periodical title
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue
55(12)=352:2011.12
Volume
55
Issue
12