クラスターイオンビー...

クラスターイオンビーム技術の開発,半導体からバイオ材料まで (特集 医療機器における表面修飾技術の応用)

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クラスターイオンビーム技術の開発,半導体からバイオ材料まで

(特集 医療機器における表面修飾技術の応用)

Call No. (NDL)
Z14-778
Bibliographic ID of National Diet Library
023446433
Material type
記事
Author
山田 公
Publisher
東京 : 日本材料科学会 ; 2002-
Publication date
2011
Material Format
Paper
Journal name
材料の科学と工学 : 日本材料科学会誌 48(6)=276:2011
Publication Page
p.272-277
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Paper

Material Type
記事
Author/Editor
山田 公
Author Heading
Alternative Title
Development of Cluster Ion Beam Technology : Applications from Semiconductors to Biomaterials
Periodical title
材料の科学と工学 : 日本材料科学会誌
No. or year of volume/issue
48(6)=276:2011
Volume
48
Issue
6