熱フィラメントCVD...

熱フィラメントCVD法で堆積したダイヤモンド薄膜の構造と二次電子放出係数

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熱フィラメントCVD法で堆積したダイヤモンド薄膜の構造と二次電子放出係数

Call No. (NDL)
Z16-302
Bibliographic ID of National Diet Library
023753820
Material type
記事
Author
村上 雅彦ほか
Publisher
東京 : 照明学会
Publication date
2012-05
Material Format
Paper
Journal name
照明学会誌 = Journal of the Illuminating Engineering Institute of Japan 96(5):2012.5
Publication Page
p.293-297
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Paper

Material Type
記事
Author/Editor
村上 雅彦
山口 聡
高畠 信也 他
Alternative Title
Structure and Secondary Electron Emission Coefficient of Diamond Films Deposited by Hot-filament CVD
Periodical title
照明学会誌 = Journal of the Illuminating Engineering Institute of Japan
No. or year of volume/issue
96(5):2012.5
Volume
96
Issue
5
Pages
293-297