走査型プローブ顕微鏡による薄膜表面粗さ測定のJIS化 (特集 走査型プローブ顕微鏡)
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- Material Type
- 記事
- Author/Editor
- 草野 英二
- Series Title
- Author Heading
- Alternative Title
- Standardization of Surface Roughness Measurements of Fine Ceramics Thin Films by Scanning Probe Microscopy
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 79(3)=939:2013.3
- Volume
- 79
- Issue
- 3