序論 ナノ計測の標準...

序論 ナノ計測の標準化 : 最近の動向とロードマップ (小特集 走査型プローブ顕微鏡によるナノ計測法の標準化)

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序論 ナノ計測の標準化 : 最近の動向とロードマップ(小特集 走査型プローブ顕微鏡によるナノ計測法の標準化)

Call No. (NDL)
Z16-474
Bibliographic ID of National Diet Library
024760273
Material type
記事
Author
一村 信吾
Publisher
東京 : 日本真空協会
Publication date
2013-07
Material Format
Paper
Journal name
Journal of the Vacuum Society of Japan = 真空 56(7):2013.7
Publication Page
p.249-251
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Paper Digital

Material Type
記事
Author/Editor
一村 信吾
Author Heading
Alternative Title
Standardization of Measurement and Characterization for Nanotechnology : Recent Trend and Roadmap
Periodical title
Journal of the Vacuum Society of Japan = 真空
No. or year of volume/issue
56(7):2013.7
Volume
56
Issue
7