磁気トンネル接合の成膜技術の進展 (小特集 スパッタリングをめぐる技術(3))
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- Material Type
- 記事
- Title
- Author/Editor
- 恒川 孝二
- Series Title
- Author Heading
- Alternative Title
- Progress in Deposition Technology of Magnetic Tunnel Junctions
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 57(3):2014.3
- Volume
- 57
- Issue
- 3