圧電ダイアフラム型超音波センサのポーリングによる感度変化とその面内応力の影響 (特集 平成25年度センサ・マイクロマシン部門総合研究会)
Digital data available（Japan Link Center）
Begin reading now
CiNii Research
Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
other
CiNii Research
Search ServiceDigitalYou can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 山下 馨田中 光森本 篤 他
- Series Title
- Alternative Title
- Sensitivity Modification of Piezoelectric Diaphragm-Type Ultrasonic Microsensors by Poling and Influence of in-Plane Stress
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 134(5):2014.5
- Volume
- 134
- Issue
- 5