フレキシブル透明TFTに向けた低温プロセスZnO薄膜の結晶性評価 (機構デバイス 材料デバイスサマーミーティング)

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フレキシブル透明TFTに向けた低温プロセスZnO薄膜の結晶性評価

(機構デバイス 材料デバイスサマーミーティング)

Call No. (NDL)
Z16-940
Bibliographic ID of National Diet Library
025590374
Material type
記事
Author
渡邉 拓ほか
Publisher
東京 : 電子情報通信学会
Publication date
2014-06-20
Material Format
Paper
Journal name
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 114(94):2014.6.20
Publication Page
p.5-9
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Paper

Material Type
記事
Author/Editor
渡邉 拓
Adie Bin Mohd Khafe
山内 博 他
Alternative Title
Crystalline Evaluation of ZnO Thin Film Fabricated by Low-temperature Process for Flexible Transparent TFT
Periodical title
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue
114(94):2014.6.20
Volume
114
Issue
94