原子層堆積法を用いて製膜した極薄絶縁層を用いた有機電界効果トランジスタ (小特集 真空プロセスで創る有機デバイス研究・開発の最前線)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 小野 新平
- Series Title
- Author Heading
- Alternative Title
- High Performance Organic Field-Effect Transistors with High-k Insulator Deposited Directly onto the Organic Semiconductor
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 58(3):2015.3
- Volume
- 58
- Issue
- 3