P(VDF/TrFE)薄膜を用いたMEMS超音波センサの開発 (特集 平成26年度「センサ・マイクロマシン部門総合研究会」)
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- Material Type
- 記事
- Author/Editor
- 田中 恒久村上 修一宇野 真由美 他
- Series Title
- Alternative Title
- Development of MEMS Ultrasonic Sensor Using P(VDF/TrFE) Thin Films
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 135(5):2015.5
- Volume
- 135
- Issue
- 5