中重負荷向けドライ真...

中重負荷向けドライ真空ポンプの省エネルギー化 (小特集 省エネポンプ)

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中重負荷向けドライ真空ポンプの省エネルギー化(小特集 省エネポンプ)

Call No. (NDL)
Z16-474
Bibliographic ID of National Diet Library
026611860
Material type
記事
Author
杉浦 哲郎
Publisher
東京 : 日本真空協会
Publication date
2015-07
Material Format
Paper
Journal name
Journal of the Vacuum Society of Japan = 真空 58(7):2015.7
Publication Page
p.245-248
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Paper Digital

Material Type
記事
Author/Editor
杉浦 哲郎
Author Heading
Alternative Title
Saving Energy of Dry Vacuum Pump for Harsh Process
Periodical title
Journal of the Vacuum Society of Japan = 真空
No. or year of volume/issue
58(7):2015.7
Volume
58
Issue
7