誘導結合プラズマ支援型多重磁極型マグネトロンスパッタ法により柔軟性素材上に作製したNi薄膜に及ぼすイオン照射の効果
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 宮下 翔豊田 宏
- Alternative Title
- Effect of Ion Irradiation for Ni Films prepared on a Flexible Substrate Material Using Magnetron Sputtering with Multipolar Magnetic Plasma Confinement Assisted by Inductively Coupled Plasma
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 58(8):2015.8
- Volume
- 58
- Issue
- 8
- Pages
- 319-323