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招待講演 ITRS 2011年版の概要と半導体技術の将来動向

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招待講演 ITRS 2011年版の概要と半導体技術の将来動向

Call No. (NDL)
Z43-2637
Bibliographic ID of National Diet Library
026725746
Material type
記事
Author
石内 秀美
Publisher
東京 : 電気化学会電子材料委員会
Publication date
2012-07
Material Format
Paper
Journal name
半導体・集積回路技術シンポジウム講演論文集 = Proceedings of Symposium on Semiconductors and Integrated Circuits Technology 76:2012.7.5・6
Publication Page
p.7-10
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Paper

Material Type
記事
Author/Editor
石内 秀美
Author Heading
Alternative Title
Overview of ITRS 2011 Edition and Trend of Semiconductor Technology
Periodical title
半導体・集積回路技術シンポジウム講演論文集 = Proceedings of Symposium on Semiconductors and Integrated Circuits Technology
No. or year of volume/issue
76:2012.7.5・6
Volume
76
Pages
7-10
Publication date of volume/issue (W3CDTF)
2012-07