Decoupling Control Method for High-Precision Stages using Multiple Actuators considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation (Special Issue on "Motion Control and its Related Technologies")
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- Material Type
- 記事
- Author/Editor
- Wataru OhnishiHiroshi FujimotoKoichi Sakata 他
- Author Heading
- Periodical title
- IEEJ journal of industry applications
- No. or year of volume/issue
- 5(2):2016
- Volume
- 5
- Issue
- 2
- Pages
- 141-147