イオンビームアシストMBE法による立方晶BN(c-BN)薄膜のヘテロエピタキシャル成長
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- Material Type
- 記事
- Author/Editor
- 平間 一行谷保 芳孝山本 秀樹熊倉 一英
- Alternative Title
- Heteroepitaxial growth of cubic boron nitride (c-BN) thin films by ion-beam-assisted MBE
- Periodical title
- 応用物理
- No. or year of volume/issue
- 85(4):2016.4
- Volume
- 85
- Issue
- 4
- Pages
- 306-310