ESR/EDMRによる窒化したSiC-MOS界面の構造評価
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- Material Type
- 記事
- Author/Editor
- 梅田 享英
- Author Heading
- Alternative Title
- ESR and EDMR study on nitrided 4H-SiC MOS structures
- Periodical title
- 応用物理
- No. or year of volume/issue
- 85(7):2016.7
- Volume
- 85
- Issue
- 7
- Pages
- 580-584