燃焼炎3段階合成法による合成ダイヤモンド皮膜の表面粗さに及ぼす影響因子について
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- Material Type
- 記事
- Author/Editor
- 髙橋 護瀬川 悟志神谷 修
- Alternative Title
- Influence Factors of Surface Roughness of Synthesized Diamond Films by Three-step Synthesis Method Using Flame Combustion
- Periodical title
- スマートプロセス学会誌 = Journal of smart processing
- No. or year of volume/issue
- 6(2):2017.3
- Volume
- 6
- Issue
- 2
- Pages
- 87-94