工業用純チタンのスパ...

工業用純チタンのスパッタエッチングによる微細突起物の形成

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工業用純チタンのスパッタエッチングによる微細突起物の形成

Call No. (NDL)
Z17-314
Bibliographic ID of National Diet Library
028094848
Material type
記事
Author
中佐 啓治郎ほか
Publisher
仙台 : 日本金属学会 ; 1937-
Publication date
2017-04
Material Format
Paper
Journal name
日本金属学会誌 = The journal of the Japan Institute of Metals and Materials 81(4):2017.4
Publication Page
p.211-220
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Paper Digital

Material Type
記事
Author/Editor
中佐 啓治郎
山本 旭宏
久保 隆
王 栄光
李木 経孝
Alternative Title
Formation of Fine Protrusions by Sputter Etching of Commercially Pure Titanium
Periodical title
日本金属学会誌 = The journal of the Japan Institute of Metals and Materials
No. or year of volume/issue
81(4):2017.4
Volume
81
Issue
4
Pages
211-220