貼り合わせSi-on-Quartz基板上にエピタキシャル成長したGe層における格子ひずみと光学物性の評価 (電子部品・材料)

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貼り合わせSi-on-Quartz基板上にエピタキシャル成長したGe層における格子ひずみと光学物性の評価

(電子部品・材料)

Call No. (NDL)
Z16-940
Bibliographic ID of National Diet Library
029726496
Material type
記事
Author
野口 恭甫ほか
Publisher
東京 : 電子情報通信学会
Publication date
2019-05
Material Format
Paper
Journal name
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 119(35):2019.5.16・17
Publication Page
p.21-24
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Paper

Material Type
記事
Author/Editor
野口 恭甫
西村 道治
松井 純爾
津坂 佳幸
石川 靖彦
Alternative Title
Characterizations of lattice strain and optical properties for Ge layers epitaxially grown on bonded Si-on-quartz substrate
Periodical title
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue
119(35):2019.5.16・17
Volume
119
Issue
35