Relationship between Oxygen Additive Amount and Photoresist Removal Rate Using H Radicals Generated on an Iridium Hot-Wire Catalyst
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- Material Type
- 記事
- Author/Editor
- Masashi YamamotoTomohiro ShiroiTomokazu ShikamaShiro NagaokaHironobu UmemotoHideo Horibe
- Author Heading
- Periodical title
- Journal of photopolymer science and technology
- No. or year of volume/issue
- 32(4):2019
- Volume
- 32
- Issue
- 4
- Pages
- 609-614
- Publication date of volume/issue (W3CDTF)
- 2019