Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 泥谷 亮太伊藤 隆太山本 世翔神村 勇馬堤井 君元松本 精一郎
- Alternative Title
- Synthesis of Boron Nitride Films by Surface-Wave Plasma-Enhanced CVD and Characterization of Their Insulation Properties
- Periodical title
- 電気学会研究会資料. HV = The papers of technical meeting on high voltage engineering, IEE Japan / 高電圧研究会 [編]
- No. or year of volume/issue
- 2021(1-18):2021.1.22
- Volume
- 2021
- Issue
- 1-18