転写技術を用いたSi基板上の表面照射型InGaAs PhotoFETsによる赤外線検出 (特集 Society 5.0時代を創出する異種材料集積半導体デバイス)
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- Material Type
- 記事
- Author/Editor
- 大石 和明石井 裕之張 文馨清水 鉄司石井 寛仁藤代 博記遠藤 聡前田 辰郎
- Series Title
- Alternative Title
- SWIR Detection of Front Side Illumination InGaAs PhotoFETs on Si Substrate through Layer Transfer Technology
- Periodical title
- 表面と真空 = Vacuum and surface science / 日本表面科学会, 日本真空学会 編
- No. or year of volume/issue
- 64(2):2021.2
- Volume
- 64
- Issue
- 2