陽電子ビームによる大気環境下での機能性薄膜評価 (特集 Operando計測 : 先端計測が拓く革新的材料・デバイス開発事例)
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- Material Type
- 記事
- Author/Editor
- 大島 永康
- Series Title
- Author Heading
- Periodical title
- 計測と制御 : journal of the Society of Instrument and Control Engineers
- No. or year of volume/issue
- 60(3):2021.3
- Volume
- 60
- Issue
- 3
- Pages
- 187-191