MOD法によるC面サファイア基板上VO[x]薄膜成長と評価
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- Material Type
- 記事
- Author/Editor
- 和田 英男小池 一歩矢野 満明
- Alternative Title
- Characterization of the VO[x] Thin Films Grown on C-plane Sapphire Substrates by MOD
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 141(5):2021.5
- Volume
- 141
- Issue
- 5
- Pages
- 345-350