ナノカーボンの触媒作用に基づく半導体表面の選択エッチング (特集 2020年日本表面真空学会学術講演会特集号(2))
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- Material Type
- 記事
- Author/Editor
- 三栗野 諒小笠原 歩見川合 健太郎山村 和也有馬 健太
- Series Title
- Alternative Title
- Selective Etching of Semiconductor Surfaces by Catalytic Activity of Nanocarbon
- Periodical title
- 表面と真空 = Vacuum and surface science / 日本表面科学会, 日本真空学会 編
- No. or year of volume/issue
- 64(8):2021.8
- Volume
- 64
- Issue
- 8