単結晶ダイヤモンド工具による硬脆材料のUVレーザ援用微細加工
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- Material Type
- 記事
- Author/Editor
- 由井 明紀
- Author Heading
- Alternative Title
- Micro Cutting of Brittle Material using Monocrystalline Diamond Tool Assisted by UV-laser
- Periodical title
- 神奈川大学工学研究 = Technology reports, Kanagawa University / 神奈川大学工学研究所 編
- No. or year of volume/issue
- (5):2022.3
- Issue
- 5
- Pages
- 60-64
- Publication date of volume/issue (W3CDTF)
- 2022-03