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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 堀川 教世春山 義夫島 聡史
- Alternative Title
- Fabrication of micro thermal device using LIGA like process
- Periodical title
- 富山県立大学紀要 = Bulletin of Toyama Prefectural University / 富山県立大学 編
- No. or year of volume/issue
- 19 2009.3
- Volume
- 19
- Pages
- 24～29
- Publication date of volume/issue (W3CDTF)
- 2009-03