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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 小森 圭悟森田 昇高野 登 他
- Alternative Title
- Removal of a single layer from multiple layers in LSI using machining cantilever in AFM
- Periodical title
- Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
- No. or year of volume/issue
- 53(6) (通号 322) 2009.6
- Volume
- 53
- Issue
- 6
- Sequential issue number
- 322