MOSトランジスタのスケーリングに伴う特性ばらつき (小特集 CMOSデバイスの微細化に伴う特性ばらつきの増大とその対策)
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- Material Type
- 記事
- Author/Editor
- 平本 俊郎竹内 潔西田 彰男
- Series Title
- Alternative Title
- Variability of characteristics in scaled MOSFETs
- Periodical title
- 電子情報通信学会誌 = The journal of the Institute of Electronics, Information and Communication Engineers
- No. or year of volume/issue
- 92(6) (通号 1021) 2009.6
- Volume
- 92
- Issue
- 6