勾配変化させた基板バイアス電圧がTiAlN膜微細組織と切削性能に与える影響
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- Material Type
- 記事
- Author/Editor
- 福井 治世今村 晋也田林 大二 他
- Alternative Title
- Effects of linearly ramping substrate bias on microstructure and cutting performance of TiAlN coating
- Periodical title
- Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
- No. or year of volume/issue
- 53(10) (通号 326) 2009.10
- Volume
- 53
- Issue
- 10
- Sequential issue number
- 326