光放射圧制御マイクロプローブ球を利用した定在場スケール変位センサの研究 (第14回 知能メカトロニクスワークショップ講演論文集)

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光放射圧制御マイクロプローブ球を利用した定在場スケール変位センサの研究

(第14回 知能メカトロニクスワークショップ講演論文集)

Call No. (NDL)
Z74-C287
Bibliographic ID of National Diet Library
10481378
Material type
記事
Author
高谷 裕浩ほか
Publisher
高松 : 精密工学会
Publication date
2009-09
Material Format
Paper
Journal name
知能メカトロニクスワークショップ講演論文集 14 2009.9.26・27
Publication Page
p.90~95
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Paper

Material Type
記事
Author/Editor
高谷 裕浩
道畑 正岐
林 照剛
Alternative Title
Displacement measurement on the standing wave scale using a microsphere controlled by optical radiation pressure
Periodical title
知能メカトロニクスワークショップ講演論文集
No. or year of volume/issue
14 2009.9.26・27
Volume
14
Pages
90~95