酸素プラズマ処理によ...

酸素プラズマ処理によるシリコン添加DLC膜の低摩擦化

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酸素プラズマ処理によるシリコン添加DLC膜の低摩擦化

Call No. (NDL)
Z16-540
Bibliographic ID of National Diet Library
10496113
Material type
記事
Author
Junho Choiほか
Publisher
東京 : 日本トライボロジー学会 ; 1989-
Publication date
2009
Material Format
Paper
Journal name
トライボロジスト = Journal of Japanese Society of Tribologists / 日本トライボロジー学会 編 54(11) 2009
Publication Page
p.783~791
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Paper

Material Type
記事
Author/Editor
Junho Choi
角田 篤史
熊谷 知久 他
Alternative Title
Low friction properties of Si-incorporated DLC coatings treated with oxygen plasma
Periodical title
トライボロジスト = Journal of Japanese Society of Tribologists / 日本トライボロジー学会 編
No. or year of volume/issue
54(11) 2009
Volume
54
Issue
11
Pages
783~791