Holdings of Libraries in Japan
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Bibliographic Record
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- Material Type
- 記事
- Title
- Author/Editor
- 一木 隆範
- Series Title
- Author Heading
- Alternative Title
- Application of microplasmas to microfabrication technology
- Periodical title
- 材料の科学と工学 : 日本材料科学会誌
- No. or year of volume/issue
- 47(3) (通号 267) 2010
- Volume
- 47
- Issue
- 3