粘接着テープを用いた半導体製造工程におけるピックアップ性能評価
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 佐伯 尚哉市川 功因幡 和晃 他
- Alternative Title
- Evaluation of pick-up performance on semiconductor manufacturing using an adhesive tape
- Periodical title
- 日本機械学会論文集. A編
- No. or year of volume/issue
- 76(766) 2010.6
- Volume
- 76
- Issue
- 766
- Pages
- 730～736