Volume number110(157) 2010.7.29
プラズマ支援真空蒸着...

プラズマ支援真空蒸着法で成膜したポリイミド系薄膜の表面特性 (有機エレクトロニクス)

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プラズマ支援真空蒸着法で成膜したポリイミド系薄膜の表面特性

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Call No. (NDL)
Z16-940
Bibliographic ID of National Diet Library
10787091
Material type
記事
Author
岩森 暁ほか
Publisher
東京 : 電子情報通信学会
Publication date
2010-07-29
Material Format
Paper
Journal name
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 110(157) 2010.7.29
Publication Page
p.1~5
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Paper

Material Type
記事
Author/Editor
岩森 暁
杉本 亮祐
長田 幸輔 他
Alternative Title
Surface properties of organic thin films prepared by a plasma enhanced vacuum evaporation
Periodical title
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue
110(157) 2010.7.29
Volume
110
Issue
157