走査型キャパシタンス顕微鏡による微小領域の半導体不純物分布測定
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- Material Type
- 記事
- Author/Editor
- 峯尾 江利子久保 真紀中沢 正敏 他
- Periodical title
- 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
- No. or year of volume/issue
- 20(1) 1999.01
- Volume
- 20
- Issue
- 1
- Pages
- 27～32
- Publication date of volume/issue (W3CDTF)
- 1999-01