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収束イオンビームとマルチチャネル並列検出系を用いたサブミクロンSIMS

Call No. (NDL)
Z15-243
Bibliographic ID of National Diet Library
3127442
Material type
記事
Author
二瓶 好正ほか
Publisher
東京 : 応用物理学会
Publication date
1987-06
Material Format
Paper
Journal name
応用物理 56(6) 1987.06
Publication Page
p.p746~751
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Paper

Material Type
記事
Author/Editor
二瓶 好正
佐藤 仁美
尾張 真則
Periodical title
応用物理
No. or year of volume/issue
56(6) 1987.06
Volume
56
Issue
6
Pages
p746~751
Publication date of volume/issue (W3CDTF)
1987-06