観察面の上下振動の影...

観察面の上下振動の影響を受けない光を用いた超精密面の全方向粗さ測定

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観察面の上下振動の影響を受けない光を用いた超精密面の全方向粗さ測定

Call No. (NDL)
Z15-269
Bibliographic ID of National Diet Library
3150585
Material type
記事
Author
安達 正明ほか
Publisher
東京 : 日本光学会
Publication date
1987-12
Material Format
Paper
Journal name
光学 = Japanese journal of optics : publication of the Optical Society of Japan 16(12) 1987.12
Publication Page
p.p548~552
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Paper

Material Type
記事
Author/Editor
安達 正明
八坂 勝彦
川口 格
Periodical title
光学 = Japanese journal of optics : publication of the Optical Society of Japan
No. or year of volume/issue
16(12) 1987.12
Volume
16
Issue
12
Pages
p548~552
Publication date of volume/issue (W3CDTF)
1987-12